Search results for "Microelectromechanical systems"
showing 10 items of 21 documents
Microfabrication of hybrid fluid membrane for microengines
2015
International audience; This paper describes the microfabrication and dynamic characterization of thick membranes providing a technological solution for microengines. The studied membranes are called hybrid fluid-membrane (HFM) and consist of two thin membranes that encapsulate an incompressible fluid. This work details the microelectromechanical system (MEMS) scalable fabrication and characterization of HFMs. The membranes are composite structures based on Silicon spiral springs embedded in a polymer (RTV silicone). The anodic bonding of multiple stacks of Si/glass structures, the fluid filling and the sealing have been demonstrated. Various HFMs were successfully fabricated and their dyna…
A LiDAR Prototype with Silicon Photomultiplier and MEMS Mirrors
2018
In this paper, we present a low cost prototype of a Time-Of-Flight (TOF) LiDAR system, employing a SiPM as photo detector and MEMS mirrors in order to steer the nanosecond pulsed optical beam with a scanning angle of +/-6°. Preliminary TOF measurements have been performed both indoor and outdoor to test the limits of the system.
Low-frequency band gap in cross-like holey phononic crystal strip
2018
International audience; A silicon-based cross-like holey phononic crystal (PnC) strip is proposed for the control of elastic waves in the field of micro-electro-mechanical systems (MEMS). The goal is to obtain a broad bandgap at low frequencies with a lightweight structure. In this respect, the effects of varying the in-plane and the out-of-plane geometry parameters are discussed. After design, a gap-to-midgap ratio of 47% is obtained with an intermediate filling fraction of the solid material and a small thickness of the strip. The band gap can be moved to an extremely low frequency range while keeping the strip significantly smaller than previously reported PnC strips. The transmission pr…
SnO2 : Sb - A new material for high-temperature MEMS heater applications: Performance and limitations
2007
MEMS micro heater devices capable of long-term operation at temperatures up to 1000 degrees C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film. (c) 2007 Elsevier B.V. All rights reserved.
Mechanical Bistable Structures for Microrobotics and Mesorobotics from Microfabrication to Additive Manufacturing
2018
International audience; The use of mechanical bistable structures in the design of microrobots and mesorobots has many advantages especially for flexible robotic structures. However, depending on the fabrication technology used, the adequacy of theoretical and experimental mechanical behaviors can vary widely. In this paper, we present the manufacturing results of bistable structures made with two extensively used contemporary technologies: MEMS and FDM additive manufacturing. Key issues of these fabrication technologies are discussed in the context of microrobotics and mesorobotics applications.
Characterization of MEMS accelerometer self-noise by means of PSD and Allan Variance analysis
2017
In this paper, we have studied the sources of error of a low-cost 3-axis MEMS accelerometer by means of Power Spectral Density and Allan Variance techniques. These techniques were applied to the signals acquired from ten identical devices to characterize the variability of the sensor produced by the same manufacturer. Our analysis showed as identically produced accelerometer have somehow variable behavior in particular at low frequency. It is therefore of paramount importance before their use in Inertial Navigation or Earthquakes Monitoring System, a complete characterization of each single sensors.
Performance of Thin-Film Lithium Energy Cells under Uniaxial Pressure
2008
The objective of this study was two-fold. The first objective was to determine if the all-solid-state thin-film lithium energy cells could withstand the minimal 550 kPa uniaxial pressure required for composite manufacturing, which both specimens successfully did. The second objective was to determine the upper boundary uniaxial pressure limit of operation for the all-solid-state thin-film lithium energy cells. The two all-solid- state thin-film lithium energy cells tested in the present study under uniaxial pressure performed well even when subjected to uniaxial pressures up to about 2.0 MPa. However, pressures higher than this value led to their degradation. The observed degradation was du…
Muscular MEMS—the engineering of liquid crystal elastomer actuators
2016
A new class of soft-matter actuator, the liquid crystal elastomer (LCE), shows promise for application in a wide variety of mechanical microsystems. Frequently referred to as an 'artificial muscle', this family of materials exhibits large actuation stroke and generates considerable force, in a compact form which may easily be combined with the structures and devices commonly used in microsystems and MEMS. We show here how standard microfabrication techniques may be used to integrate LCEs into mechanical microsystems and present an in-depth analysis of their mechanical and actuation properties. Using an example from micro-optics and optical MEMS, we demonstrate that their performance and fle…
Micro-Machining
2017
This chapter provides comprehensive knowledge regarding the fabrication of micro-products and element of micro-electromechanical systems using various techniques and processes. Both well-established techniques such as micro-machining and new trends in improving micro-processes taking into account EDM, laser, FIB, LIGA and DRIE processes are overviewed. The background of micro-machining processes, including typical machining operations such as turning, milling and drilling and different construction materials, is outlined. Moreover, a special focus was made on new constructions, control systems and effective applications of micro-machining techniques. In addition, the focus was directed towa…
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
2017
In this work, we present a method to pattern liquid crystal elastomers (LCEs) in the micrometer range without using any mechanical processing steps to prepare micron sized LCE actuators compatible with microelectromechanical system (MEMS) technology. Multi-layer spin-coating processes are developed to synthesise and structure 300–3500 nm thick LCE films. A water soluble sacrificial layer, a photoalignment layer and a LCE formulation, which is polymerised and crosslinked in its liquid crystal phase, are spin-coated successively onto a substrate. A fluorinated photoresist layer is used to structure LCE films with thicknesses up to 700 nm in a photolithographic and etching process. For thicker…